Replace each disk one by one until it rebuilds one by one
Extend the array (functonality depends on raid controller)
Once array extends you'll have free space, you can do one of the following:
1. Create an additional datastore in the empty space
2. Create an extent to extend your current datastore
Before doing anything backup, backup, backup.
The cleanest way to do this is backup up the virtual machines off the ESX Server, wipe clean and delete the currenty array. Recreate one with the new drives (when you take the old drives out you'll still have the old data just in case)